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Ultra energy-saving precision temperature and humidity control equipment
Application area:
Product Description:Suitable for 100~200mm wafer coating and developing equipment (applicable for front and back channels)

Application areas: semiconductor coating process, photolithography process, development process, packaging inspection, LCD panel, new energy, data center

Safety: Compliant with SEMI S2/F47, drain pan (with leakage sensor), residual current circuit breaker, alarm function, liquid level switch, shockproof bracket, overflow valve

Chemical filter (optional)

Convenient features: casters/adjustable footrest, upper drainage (optional)

Communication method: RS-232/RS-485

Control mode: dual point control

Energy saving: Variable frequency compressor, variable frequency fan, heat recovery system

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