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Precision temperature and humidity regulator
Application area:Wafer manufacturing, LCD panel, package testing, precision measurement, academic research, etc.
Product Description:For exposure equipment, coating/developing equipment used in semiconductor production, etc., the temperature and humidity of the ambient air in the process cavity are precisely controlled to ensure the yield of products.

Application areas: semiconductor coating process, photolithography process, development process, packaging inspection, LCD panel, new energy, data center

Safety: Compliant with SEMI S2/F47, drain pan (with leakage sensor), residual current circuit breaker, alarm function, liquid level switch, shockproof bracket, overflow valve

Chemical filter (optional)

Convenient features: casters/adjustable footrest, upper drainage (optional)

Communication method: RS-232/RS-485

Control mode: dual point control

Energy saving: Variable frequency compressor, variable frequency fan

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