4001-0666-85
Home
Product center
Large-scale exhaust gas treatment equipment(LSU)
Super energy-saving precision temp./humi. air-condition system （ETHC）
Ultra-low temperature chiller (UTC)
Precision Coolant Temp. Control Device（LTC）
Precision temp./humi. air & precision liquid compound system (ACU)
After-sales service
About us
Company Profile
Corporate culture
Development history
Core advantages
Cooperative partners
Join us
Contact information
CN
Home
Product center
After-sales service
News
About us
Contact information
产品信息
ACU
THC
CHILLER
TCH
关于我们
公司概况
发展历程
优势技术
企业文化
Current：
HOME
/ Product Center / ACU
Precision temp./humi. air & precision liquid compound system (ACU)
Application area:Wafer manufacturing, LCD panel, package testing, precision measurement, academic research, etc.
Product Description:In the exposure equipment, coating/developing equipment used for semiconductor production, etc., the ambient temperature and humidity in the process cavity are precisely controlled to ensure the yield of products.
TOP
4001-0666-85
