Application areas: semiconductor coating process, photolithography process, development process, wafer inspection process, packaging testing, LCD panel, new technology

Energy, scientific instruments, data centers, upgrading traditional industries, biomedicine

Safety: Compliant with SEMI S2/F47, drain pan (with leakage sensor), residual current circuit breaker, alarm function, liquid level switch, shockproof bracket, overflow valve

Convenient functions: flow sensor, caster/adjustable footrest, piping adapter, piping distributor (optional), automatic liquid filling (optional)

Communication method: RS-232/RS-485

Control mode: dual point control

Energy saving: Variable frequency compressor, variable frequency pump